# this file is part of refractiveindex.info database # refractiveindex.info database is in the public domain # copyright and related rights waived via CC0 1.0 REFERENCES: | A. Jolivet, C. Labbé, C. Frilay, O. Debieu, P. Marie, B. Horcholle, F. Lemarié, X. Portier, C. Grygiel, S. Duprey, W. Jadwisienczak, D. Ingram, M. Upadhyay, A. David, A. Fouchet, U. Lüders, J. Cardin. Structural, optical, and electrical properties of TiO2 thin films deposited by ALD: Impact of the substrate, the deposited thickness and the deposition temperature. Appl. Surf. Sci. 608, 155214 (2023) (Numerical data kindly provided by Julien Cardin) COMMENTS: | TiO2 anatase thin film deposited by ALD at 300 °C DATA: - type: tabulated nk data: | 0.20664 1.62407 1.32064 0.20699 1.62786 1.32392 0.20733 1.63168 1.32720 0.20768 1.63554 1.33049 0.20803 1.63943 1.33378 0.20838 1.64335 1.33707 0.20873 1.64730 1.34037 0.20908 1.65129 1.34366 0.20943 1.65531 1.34696 0.20979 1.65937 1.35027 0.21014 1.66346 1.35357 0.21050 1.66759 1.35688 0.21086 1.67175 1.36019 0.21122 1.67594 1.36351 0.21158 1.68018 1.36682 0.21194 1.68445 1.37014 0.21230 1.68875 1.37346 0.21267 1.69309 1.37678 0.21303 1.69747 1.38010 0.21340 1.70189 1.38343 0.21377 1.70635 1.38675 0.21414 1.71084 1.39008 0.21451 1.71538 1.39340 0.21488 1.71995 1.39673 0.21525 1.72456 1.40006 0.21562 1.72922 1.40339 0.21600 1.73391 1.40672 0.21638 1.73865 1.41005 0.21676 1.74343 1.41338 0.21714 1.74825 1.41671 0.21752 1.75311 1.42004 0.21790 1.75801 1.42337 0.21828 1.76296 1.42670 0.21867 1.76796 1.43002 0.21905 1.77300 1.43335 0.21944 1.77808 1.43667 0.21983 1.78321 1.44000 0.22022 1.78838 1.44332 0.22061 1.79361 1.44664 0.22101 1.79888 1.44995 0.22140 1.80419 1.45327 0.22180 1.80956 1.45658 0.22219 1.81497 1.45988 0.22259 1.82043 1.46319 0.22299 1.82595 1.46649 0.22339 1.83151 1.46978 0.22380 1.83713 1.47307 0.22420 1.84279 1.47636 0.22461 1.84851 1.47964 0.22502 1.85429 1.48291 0.22543 1.86011 1.48618 0.22584 1.86599 1.48945 0.22625 1.87193 1.49270 0.22666 1.87792 1.49595 0.22708 1.88397 1.49919 0.22749 1.89007 1.50243 0.22791 1.89623 1.50565 0.22833 1.90245 1.50887 0.22875 1.90873 1.51207 0.22918 1.91507 1.51527 0.22960 1.92147 1.51846 0.23003 1.92793 1.52164 0.23045 1.93445 1.52480 0.23088 1.94103 1.52795 0.23131 1.94768 1.53109 0.23175 1.95440 1.53422 0.23218 1.96117 1.53734 0.23262 1.96802 1.54043 0.23305 1.97492 1.54352 0.23349 1.98190 1.54659 0.23393 1.98895 1.54964 0.23437 1.99606 1.55268 0.23482 2.00325 1.55569 0.23526 2.01050 1.55869 0.23571 2.01783 1.56167 0.23616 2.02523 1.56463 0.23661 2.03270 1.56757 0.23706 2.04024 1.57049 0.23752 2.04787 1.57338 0.23797 2.05556 1.57625 0.23843 2.06334 1.57910 0.23889 2.07119 1.58192 0.23935 2.07912 1.58471 0.23981 2.08714 1.58748 0.24028 2.09523 1.59022 0.24075 2.10340 1.59292 0.24121 2.11166 1.59560 0.24168 2.12000 1.59825 0.24216 2.12843 1.60086 0.24263 2.13694 1.60343 0.24311 2.14554 1.60597 0.24358 2.15423 1.60848 0.24406 2.16300 1.61094 0.24454 2.17187 1.61336 0.24503 2.18082 1.61575 0.24551 2.18987 1.61809 0.24600 2.19901 1.62038 0.24649 2.20825 1.62263 0.24698 2.21758 1.62483 0.24747 2.22701 1.62698 0.24797 2.23653 1.62907 0.24847 2.24616 1.63112 0.24896 2.25588 1.63311 0.24947 2.26570 1.63504 0.24997 2.27563 1.63691 0.25047 2.28566 1.63872 0.25098 2.29579 1.64046 0.25149 2.30602 1.64214 0.25200 2.31637 1.64375 0.25251 2.32681 1.64529 0.25303 2.33737 1.64676 0.25355 2.34804 1.64815 0.25407 2.35881 1.64946 0.25459 2.36970 1.65069 0.25511 2.38069 1.65183 0.25564 2.39180 1.65289 0.25617 2.40303 1.65386 0.25670 2.41436 1.65474 0.25723 2.42582 1.65551 0.25776 2.43738 1.65619 0.25830 2.44907 1.65677 0.25884 2.46087 1.65723 0.25938 2.47279 1.65759 0.25992 2.48483 1.65784 0.26047 2.49698 1.65796 0.26102 2.50926 1.65797 0.26157 2.52165 1.65785 0.26212 2.53417 1.65759 0.26268 2.54680 1.65721 0.26324 2.55956 1.65668 0.26380 2.57243 1.65601 0.26436 2.58543 1.65520 0.26492 2.59855 1.65423 0.26549 2.61178 1.65310 0.26606 2.62514 1.65181 0.26663 2.63861 1.65036 0.26721 2.65221 1.64873 0.26778 2.66592 1.64692 0.26836 2.67974 1.64493 0.26895 2.69368 1.64274 0.26953 2.70774 1.64037 0.27012 2.72191 1.63779 0.27071 2.73619 1.63500 0.27130 2.75057 1.63200 0.27190 2.76507 1.62878 0.27249 2.77967 1.62533 0.27309 2.79437 1.62165 0.27370 2.80917 1.61773 0.27430 2.82406 1.61356 0.27491 2.83905 1.60914 0.27552 2.85412 1.60446 0.27613 2.86928 1.59951 0.27675 2.88452 1.59429 0.27737 2.89984 1.58878 0.27799 2.91522 1.58299 0.27862 2.93067 1.57690 0.27924 2.94618 1.57051 0.27987 2.96175 1.56381 0.28051 2.97735 1.55678 0.28114 2.99300 1.54944 0.28178 3.00868 1.54176 0.28242 3.02438 1.53374 0.28307 3.04009 1.52538 0.28372 3.05582 1.51666 0.28437 3.07154 1.50758 0.28502 3.08724 1.49814 0.28568 3.10292 1.48832 0.28634 3.11857 1.47813 0.28700 3.13417 1.46755 0.28767 3.14971 1.45658 0.28834 3.16518 1.44521 0.28901 3.18057 1.43345 0.28968 3.19586 1.42127 0.29036 3.21103 1.40869 0.29104 3.22608 1.39570 0.29173 3.24099 1.38229 0.29242 3.25575 1.36847 0.29311 3.27033 1.35422 0.29380 3.28472 1.33956 0.29450 3.29890 1.32447 0.29520 3.31286 1.30897 0.29591 3.32658 1.29305 0.29661 3.34004 1.27671 0.29732 3.35322 1.25995 0.29804 3.36611 1.24279 0.29876 3.37868 1.22522 0.29948 3.39092 1.20725 0.30020 3.40280 1.18889 0.30093 3.41432 1.17015 0.30166 3.42544 1.15103 0.30240 3.43616 1.13155 0.30314 3.44645 1.11171 0.30388 3.45630 1.09153 0.30463 3.46568 1.07103 0.30538 3.47459 1.05021 0.30613 3.48300 1.02909 0.30689 3.49089 1.00769 0.30765 3.49826 0.98603 0.30842 3.50509 0.96412 0.30919 3.51136 0.94199 0.30996 3.51707 0.91966 0.31074 3.52219 0.89714 0.31152 3.52672 0.87446 0.31230 3.53065 0.85165 0.31309 3.53397 0.82872 0.31388 3.53667 0.80570 0.31468 3.53875 0.78262 0.31548 3.54020 0.75950 0.31629 3.54101 0.73636 0.31710 3.54120 0.71324 0.31791 3.54075 0.69016 0.31873 3.53967 0.66715 0.31955 3.53796 0.64422 0.32037 3.53562 0.62141 0.32120 3.53265 0.59875 0.32204 3.52908 0.57625 0.32288 3.52489 0.55395 0.32372 3.52010 0.53187 0.32457 3.51473 0.51003 0.32542 3.50877 0.48846 0.32627 3.50225 0.46718 0.32714 3.49518 0.44621 0.32800 3.48758 0.42557 0.32887 3.47945 0.40528 0.32975 3.47082 0.38537 0.33062 3.46170 0.36585 0.33151 3.45211 0.34673 0.33240 3.44207 0.32805 0.33329 3.43161 0.30980 0.33419 3.42073 0.29201 0.33509 3.40946 0.27468 0.33600 3.39783 0.25784 0.33691 3.38584 0.24149 0.33783 3.37354 0.22564 0.33875 3.36092 0.21031 0.33968 3.34803 0.19549 0.34062 3.33488 0.18121 0.34155 3.32149 0.16745 0.34250 3.30789 0.15424 0.34345 3.29409 0.14157 0.34440 3.28013 0.12944 0.34536 3.26602 0.11787 0.34632 3.25178 0.10685 0.34729 3.23744 0.09638 0.34827 3.22302 0.08647 0.34925 3.20855 0.07711 0.35024 3.19404 0.06830 0.35123 3.17951 0.06005 0.35223 3.16499 0.05234 0.35323 3.15051 0.04519 0.35424 3.13607 0.03857 0.35526 3.12172 0.03250 0.35628 3.10746 0.02697 0.35730 3.09333 0.02197 0.35834 3.07935 0.01750 0.35937 3.06554 0.01355 0.36042 3.05193 0.01011 0.36147 3.03855 0.00719 0.36253 3.02544 0.00478 0.36359 3.01262 0.00287 0.36466 3.00015 0.00145 0.36574 2.98807 5.09E-04 0.36682 2.97647 5.20E-05 0.36791 2.96555 0 0.36900 2.95530 0 0.37010 2.94552 0 0.37121 2.93613 0 0.37232 2.92708 0 0.37345 2.91834 0 0.37457 2.90988 0 0.37571 2.90167 0 0.37685 2.89371 0 0.37800 2.88596 0 0.37916 2.87842 0 0.38032 2.87107 0 0.38149 2.86391 0 0.38267 2.85693 0 0.38385 2.85010 0 0.38504 2.84344 0 0.38624 2.83692 0 0.38745 2.83055 0 0.38867 2.82431 0 0.38989 2.81820 0 0.39112 2.81222 0 0.39236 2.80636 0 0.39360 2.80061 0 0.39485 2.79497 0 0.39612 2.78945 0 0.39739 2.78402 0 0.39866 2.77869 0 0.39995 2.77347 0 0.40124 2.76833 0 0.40255 2.76328 0 0.40386 2.75833 0 0.40518 2.75345 0 0.40651 2.74866 0 0.40784 2.74395 0 0.40919 2.73931 0 0.41054 2.73475 0 0.41191 2.73026 0 0.41328 2.72584 0 0.41466 2.72150 0 0.41605 2.71721 0 0.41746 2.71300 0 0.41887 2.70884 0 0.42029 2.70475 0 0.42171 2.70072 0 0.42315 2.69675 0 0.42460 2.69284 0 0.42606 2.68898 0 0.42753 2.68517 0 0.42901 2.68142 0 0.43050 2.67772 0 0.43200 2.67408 0 0.43351 2.67048 0 0.43503 2.66693 0 0.43656 2.66343 0 0.43811 2.65997 0 0.43966 2.65656 0 0.44122 2.65320 0 0.44280 2.64988 0 0.44439 2.64660 0 0.44599 2.64336 0 0.44760 2.64016 0 0.44922 2.63701 0 0.45085 2.63389 0 0.45250 2.63082 0 0.45415 2.62778 0 0.45582 2.62477 0 0.45751 2.62181 0 0.45920 2.61888 0 0.46091 2.61598 0 0.46263 2.61312 0 0.46436 2.61029 0 0.46611 2.60750 0 0.46786 2.60474 0 0.46964 2.60201 0 0.47142 2.59931 0 0.47322 2.59665 0 0.47504 2.59401 0 0.47686 2.59140 0 0.47870 2.58883 0 0.48056 2.58628 0 0.48243 2.58376 0 0.48431 2.58127 0 0.48621 2.57880 0 0.48813 2.57637 0 0.49006 2.57396 0 0.49200 2.57157 0 0.49396 2.56921 0 0.49594 2.56688 0 0.49793 2.56457 0 0.49994 2.56229 0 0.50196 2.56003 0 0.50400 2.55780 0 0.50606 2.55558 0 0.50813 2.55340 0 0.51022 2.55123 0 0.51233 2.54909 0 0.51446 2.54697 0 0.51660 2.54487 0 0.51876 2.54279 0 0.52094 2.54073 0 0.52314 2.53870 0 0.52536 2.53668 0 0.52759 2.53469 0 0.52985 2.53272 0 0.53212 2.53076 0 0.53441 2.52883 0 0.53673 2.52691 0 0.53906 2.52502 0 0.54142 2.52314 0 0.54379 2.52128 0 0.54619 2.51944 0 0.54860 2.51762 0 0.55104 2.51581 0 0.55350 2.51403 0 0.55598 2.51226 0 0.55849 2.51051 0 0.56101 2.50877 0 0.56356 2.50705 0 0.56614 2.50535 0 0.56873 2.50367 0 0.57136 2.50200 0 0.57400 2.50034 0 0.57667 2.49871 0 0.57937 2.49709 0 0.58209 2.49548 0 0.58483 2.49389 0 0.58760 2.49231 0 0.59040 2.49075 0 0.59323 2.48921 0 0.59608 2.48767 0 0.59896 2.48616 0 0.60187 2.48465 0 0.60480 2.48316 0 0.60777 2.48169 0 0.61076 2.48023 0 0.61378 2.47878 0 0.61684 2.47735 0 0.61992 2.47593 0 0.62304 2.47452 0 0.62618 2.47312 0 0.62936 2.47174 0 0.63257 2.47037 0 0.63582 2.46902 0 0.63909 2.46767 0 0.64241 2.46634 0 0.64575 2.46502 0 0.64913 2.46372 0 0.65255 2.46242 0 0.65600 2.46114 0 0.65949 2.45987 0 0.66302 2.45861 0 0.66658 2.45736 0 0.67018 2.45613 0 0.67383 2.45490 0 0.67751 2.45369 0 0.68123 2.45249 0 0.68500 2.45129 0 0.68880 2.45011 0 0.69265 2.44894 0 0.69654 2.44779 0 0.70048 2.44664 0 0.70446 2.44550 0 0.70848 2.44437 0 0.71255 2.44326 0 0.71667 2.44215 0 0.72084 2.44105 0 0.72505 2.43997 0 0.72932 2.43889 0 0.73363 2.43782 0 0.73800 2.43677 0 0.74242 2.43572 0 0.74689 2.43468 0 0.75142 2.43366 0 0.75600 2.43264 0 0.76064 2.43163 0 0.76533 2.43063 0 0.77009 2.42964 0 0.77490 2.42866 0 0.77977 2.42769 0 0.78471 2.42673 0 0.78971 2.42577 0 0.79477 2.42483 0 0.79990 2.42389 0 0.80509 2.42296 0 0.81035 2.42205 0 0.81569 2.42114 0 0.82109 2.42023 0 0.82656 2.41934 0